Standard products

Active vibration isolation - Bilz series

When even microscopic vibrations affect measurement results or production quality, active vibration isolation is required. Bilz offers two advanced solutions: the modular AIS system for heavy-duty machines and the compact e-stable mini for sensitive tabletop devices. Both systems combine real-time control, maximum isolation performance and micron precision.

Benefits & features

  • Active counterforce in real time: Through control in up to 6 degrees of freedom, a vibration counterforce is generated in 180° phase shift.
  • Almost no resonance amplification: Active isolation eliminates amplification at natural frequencies - a major drawback of passive systems.
  • Rapid recovery: Significantly reduces deflection and stabilisation time compared to passive or mechanical-pneumatic systems.
  • Stable level of work: The systems maintain a constant level even under dynamic load.
  • Low disturbance impact: No heat generation, magnetic fields or high energy consumption as with electromagnetic actuators.
  • Areas of use: Precision machining, optics, metrology, microscopy, wave technology and cleanroom applications.

AIS - Modular active insulation system for industrial machinery

AIS (Active Isolation System) is an electronic-pneumatic system with up to 6 actively controlled degrees of freedom, specifically designed for heavy, vibration-sensitive machinery. Through real-time control, vibrations are quickly and effectively reduced in both vertical and horizontal directions.

Main features:

  • DOF: 3 or 6 actively controlled degrees of freedom (can be upgraded later)
  • Control bandwidth: Up to 300 Hz
  • Sensors:
    • Displacement: 0,2 μm
    • Acceleration: 8 μg
    • Pressure: 0.2 mbar
  • Control unit: One control unit per degree of freedom, CAN bus, PLC, RS232
  • Features: Automatic switching between measurement mode and load mode, intelligent software for commissioning & diagnostics
  • Environment: Cleanroom classed
  • Vices: 800 kg - 120 000 kg
  • Natural frequencies:
    • Vertical: 1.2-2.5 Hz
    • Horizontal:
      • Standard: 2.2-2.8 Hz
      • 6 DOF: 1.1-1.9 Hz
      • High Performance: 0.8-1.9 Hz

e-stable mini - Compact active insulation for tabletop units

e-stable mini is a compact, self-propelled isolation platform for light equipment such as microscopes, interferometers and precision scales. With the voice coil actuators all 6 degrees of freedom are controlled with high precision - without the need for compressed air.

Main features:

  • DOF: 6 actively managed degrees of freedom
  • Type of actuator: Voice coil
  • Governance: Automatic levelling and locking at the touch of a button
  • User interface: LCD monitor for measurement data and diagnostics (e.g. acceleration spectrum)
  • Enclosure: Aluminium and cleanroom-compatible design
  • Power supply: 1-phase AC, 85-230 V, 50/60 Hz
  • Models:
    • 450F: 400 × 500 × 80 mm, max load 120 kg
    • 560F: 500 × 600 × 84 mm, max load 100 kg
  • Own weight: 19 kg / 28 kg

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